Ultra-thin poly-crystalline TiN films grown by HiPIMS on MgO(100) — In-situ resistance study of the initial stage of growth

TitleUltra-thin poly-crystalline TiN films grown by HiPIMS on MgO(100) — In-situ resistance study of the initial stage of growth
Publication TypeJournal Article
Year of Publication2013
AuthorsShayestehaminzadeh, S, Tryggvason, TK, Magnus, F, lafsson, SÓ, Gudmundsson, JT
JournalThin Solid Films
Volume549
Pagination199 - 203
Date PublishedJan-12-2013
ISSN00406090
URLhttp://linkinghub.elsevier.com/retrieve/pii/S0040609013012595
DOI10.1016/j.tsf.2013.07.074
Short TitleThin Solid Films
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