| Title | The properties of TiN ultra-thin films grown on SiO2 substrate by reactive high power impulse magnetron sputtering under various growth angles |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Shayestehaminzadeh, S, Tryggvason, TK, Karlsson, L, lafsson, SÓ, Gudmundsson, JT |
| Journal | Thin Solid Films |
| Volume | 548 |
| Pagination | 354 - 357 |
| Date Published | Jan-12-2013 |
| ISSN | 00406090 |
| URL | http://linkinghub.elsevier.com/retrieve/pii/S0040609013014934 |
| DOI | 10.1016/j.tsf.2013.09.025 |
| Short Title | Thin Solid Films |
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