| Title | The effect of hard nitridation on Al2O3 using a radio frequency operated plasma cell |
| Publication Type | Journal Article |
| Year of Publication | 2011 |
| Authors | Agnarsson, B, Qi, B, Göthelid, M, lafsson, SÓ, Gislason, HP |
| Journal | Thin Solid Films |
| Volume | 519 |
| Issue | 22 |
| Pagination | 7796 - 7802 |
| Date Published | Jan-09-2011 |
| ISSN | 00406090 |
| URL | http://www.sciencedirect.com/science/article/pii/S0040609011010741 |
| DOI | 10.1016/j.tsf.2011.04.227 |
| Short Title | Thin Solid Films |
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