Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy

TitleStudy of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy
Publication TypeJournal Article
Year of Publication2013
AuthorsQi, B, lafsson, SÓ, Zakharov, AA, Göthelid, M, Agnarsson, B, Gislason, HP
JournalApplied Surface Science
Volume264
Pagination349 - 357
Date PublishedJan-01-2013
ISSN01694332
URLhttp://api.elsevier.com/content/article/PII:S0169433212017503?
DOI10.1016/j.apsusc.2012.10.025
Short TitleApplied Surface Science
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