Title | Current–voltage–time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Magnus, F, Tryggvason, TK, Olafsson, S, Gudmundsson, JT |
Journal | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
Volume | 30 |
Issue | 5 |
Pagination | 050601 |
Date Published | Jan-01-2012 |
ISSN | 07342101 |
URL | http://scitation.aip.org/content/avs/journal/jvsta/30/5/10.1116/1.4732735 |
DOI | 10.1116/1.4732735 |
Short Title | J. Vac. Sci. Technol. A |
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