Current–voltage–time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge

TitleCurrent–voltage–time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge
Publication TypeJournal Article
Year of Publication2012
AuthorsMagnus, F, Tryggvason, TK, Olafsson, S, Gudmundsson, JT
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume30
Issue5
Pagination050601
Date PublishedJan-01-2012
ISSN07342101
URLhttp://scitation.aip.org/content/avs/journal/jvsta/30/5/10.1116/1.4732735
DOI10.1116/1.4732735
Short TitleJ. Vac. Sci. Technol. A
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