Current-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge

TitleCurrent-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge
Publication TypeJournal Article
Year of Publication2011
AuthorsMagnus, F, Sveinsson, OB, lafsson, SÓ, Gudmundsson, JT
JournalJournal of Applied Physics
Volume110
Issue8
Pagination083306
Date PublishedJan-01-2011
ISSN00218979
URLhttp://scitation.aip.org/content/aip/journal/jap/110/8/10.1063/1.3653233
DOI10.1063/1.3653233
Short TitleJ. Appl. Phys.
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