Title | Current-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge |
Publication Type | Journal Article |
Year of Publication | 2011 |
Authors | Magnus, F, Sveinsson, OB, lafsson, SÓ, Gudmundsson, JT |
Journal | Journal of Applied Physics |
Volume | 110 |
Issue | 8 |
Pagination | 083306 |
Date Published | Jan-01-2011 |
ISSN | 00218979 |
URL | http://scitation.aip.org/content/aip/journal/jap/110/8/10.1063/1.3653233 |
DOI | 10.1063/1.3653233 |
Short Title | J. Appl. Phys. |
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